JPS626681Y2 - - Google Patents
Info
- Publication number
- JPS626681Y2 JPS626681Y2 JP8853380U JP8853380U JPS626681Y2 JP S626681 Y2 JPS626681 Y2 JP S626681Y2 JP 8853380 U JP8853380 U JP 8853380U JP 8853380 U JP8853380 U JP 8853380U JP S626681 Y2 JPS626681 Y2 JP S626681Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer sample
- pair
- wafer
- cylindrical body
- processing boat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 229920005591 polysilicon Polymers 0.000 description 4
- 239000010453 quartz Substances 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 239000012495 reaction gas Substances 0.000 description 2
- 239000012528 membrane Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8853380U JPS626681Y2 (en]) | 1980-06-23 | 1980-06-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8853380U JPS626681Y2 (en]) | 1980-06-23 | 1980-06-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5712741U JPS5712741U (en]) | 1982-01-22 |
| JPS626681Y2 true JPS626681Y2 (en]) | 1987-02-16 |
Family
ID=29450608
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8853380U Expired JPS626681Y2 (en]) | 1980-06-23 | 1980-06-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS626681Y2 (en]) |
-
1980
- 1980-06-23 JP JP8853380U patent/JPS626681Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5712741U (en]) | 1982-01-22 |
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